These safeties listed in order with detailed descriptions (from Wikipedia):

Super Bowl IX
In what had been a defensive struggle for most of the first half of Super Bowl IX between the Pittsburgh Steelers and Minnesota Vikings, the only score in the first half came on a second quarter safety by the Steelers. Steelers defensive end Dwight White had downed Vikings quarterback Fran Tarkenton in the end zone after Tarkenton landed on a Dave Osborn fumble in the end zone which had been kicked toward the goal line by the Steelers’ other defensive end, L.C. Greenwood. The Steelers went on to win 16–6.

Super Bowl X
The Pittsburgh Steelers trailed the Dallas Cowboys 10–7 early in the fourth quarter of Super Bowl X when Dallas punter Mitch Hoopes was forced to punt from inside his own goal line. As Hoopes stepped up to make the kick, Steelers running back Reggie Harrison broke through the line and blocked the punt. The ball went through the end zone for a safety, cutting the Dallas lead to 10–9. Then Pittsburgh’s Mike Collier returned the ensuing free kick 25 yards to the Cowboys 45-yard line. Roy Gerela later kicked a 36-yard field goal to give Pittsburgh its first lead of the game, 12–10, and the Steelers went on to repeat as Super Bowl champions with a 21–17 victory. As of 2015, the Steelers are the only team to score a safety in back-to-back Super Bowls.

Super Bowl XX
In the fourth quarter of Super Bowl XX, the Chicago Bears scored a safety against the New England Patriots when defensive lineman Henry Waechter sacked quarterback Steve Grogan into the end zone. The Bears dominated the game, especially the second half, on both offense and defense, and won easily 46–10. The safety marked the last points of the game to be scored by either team.

Super Bowl XXI
In the second quarter of Super Bowl XXI, the New York Giants scored a safety against the Denver Broncos when defensive end George Martin sacked John Elway into the end zone, cutting the Broncos’ 10–7 lead to 10–9. The Giants, who had been ahead earlier, would later retake the lead and go on to win the game 39–20.

Super Bowl XXV
In the second quarter of Super Bowl XXV between the Buffalo Bills and New York Giants, Bills defensive end Bruce Smith sacked Giants quarterback Jeff Hostetler in the end zone for a safety, giving the Bills a 12–3 lead. Smith nearly forced a fumble from Hostetler on the sack but Hostetler held onto the ball to insure only two points were surrendered. As it turned out, scoring a safety instead of a touchdown was pivotal, as Buffalo ultimately lost the game 20–19 after their kicker, Scott Norwood, missed the game-winning field goal attempt wide right.

Super Bowl XLIII
In the fourth quarter of Super Bowl XLIII between the Steelers and the Arizona Cardinals, Steelers center Justin Hartwig committed a holding penalty in the Steelers own end zone, wiping out a 20-yard Ben Roethlisberger pass to Santonio Holmes on third-and-10. The automatic safety cut the Steelers’ lead to 20–16 (and subsequently put them behind 23–20 after Larry Fitzgerald caught a 63-yard touchdown pass by Kurt Warner on the Cardinals’ ensuing drive after the free kick), but Pittsburgh went on to win 27–23. It was the first time that a safety in the Super Bowl was the result of a penalty.

Super Bowl XLVI
In the first quarter of Super Bowl XLVI between the Giants and the New England Patriots, New England quarterback Tom Brady was called for intentional grounding in his own end zone after he threw the ball toward the center of the field while under pressure and where no receivers were on his team’s first offensive play of the game. This was the second time after Super Bowl IX that the first score of the game was a safety, and the second time in a Super Bowl that a safety was the result of a penalty. The Giants went on to win 21–17.

Super Bowl XLVII
In the fourth quarter of Super Bowl XLVII between the Baltimore Ravens and the San Francisco 49ers, with the Ravens ahead 34 – 29 and having the ball with 12 seconds remaining, punter Sam Koch ran the clock for 8 seconds in the end zone before being run out of bounds for a 49ers safety. The Baltimore Ravens would go on to win the game 34-31 with the 49ers being unable to return the ball in the remaining 4 seconds.

Super Bowl XLVIII
On the first play from scrimmage of Super Bowl XLVIII between the Seattle Seahawks and the Denver Broncos, Broncos quarterback Peyton Manning was shifting forward from shotgun formation when the ball was snapped past him and was then recovered in the Broncos’ own endzone by Denver halfback Knowshon Moreno to prevent a touchdown, resulting in a 2-0 lead for the Seahawks. This was the fastest score ever in a Super Bowl with just 12 seconds ticking off the clock before the safety. The Seahawks won the game 43-8.